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A perfect collection of Hindi dubbed Movies 2000s Hindi dubbed Movies 2017 Hindi dubbed Movies 1990s Hindi dubbed Movies 2000 Hindi dubbed Movies.1. Field of the Invention
The present invention generally relates to a method for processing a substrate, and an apparatus therefor, and, more particularly, to a method for processing a substrate and an apparatus therefor, by which a substrate is exposed, exposed to a fluid, processed, and returned to a process stage or to an exposure stage in a short time.
2. Description of the Background Art
It is difficult for a conventional processing apparatus to conduct processes such as exposure, development and etching with a fluid within a short time. Therefore, a conventional processing apparatus has a large chamber.
However, the conventional processing apparatus having a large chamber disadvantageously requires a large space for the large chamber.
Therefore, it is an object of the present invention to provide a method for processing a substrate and an apparatus therefor, by which a substrate is exposed, exposed to a fluid, processed, and returned to a process stage or to an exposure stage in a short time.
According to an aspect of the present invention, a method for processing a substrate, which includes the steps of providing a substrate holder for holding a substrate and moving the substrate holder to a processing position, and processing the substrate by exposing the substrate to a fluid and subsequently developing the substrate, includes the steps of placing the substrate in the substrate holder to provide the substrate in the substrate holder, processing the substrate, and moving the substrate holder to the substrate processing position after the step of processing the substrate. The step of processing the substrate includes the step of processing the substrate by the fluid at the processing position and the step of developing the substrate in a stage arranged downstream of the processing 0b46394aab